Turbo-V 81-M
Models:
969-8901
969-8902
969-8903
969-8904
87-900-983-01(D)
FEBRUARY 2008
(I) MANUALE DI ISTRUZIONI
(D) BEDIENUNGSHANDBUCH
(F) NOTICE DE MODE D’EMPLOI
(E) MANUAL DE INSTRUCCIONES
(P) MANUAL DE INSTRUÇÕES
(NL) BEDRIJFSHANDLEIDING
(DK) INSTRUKSTIONSBOG
(S) BRUKSANVISNING
(N) INSTRUKSJON MANUAL
(FIN) OHJEKÄSIKIRJA
(GR)
ODHGIES CRHSEWS
(H) FELHASZNÁLÓI KÉZIKÖNYV
(PL) PODRECZNIK INSTRUKCJI
(CZ) NÁVOD K POUŽITÍ
(SK) NÁVOD NA OBSLUHU
(SLO) PRIROČNIK ZA NAVODILA
(GB) INSTRUCTION MANUAL
Turbo-V 81-M
ISTRUZIONI PER L’USO ...................................................................................................................................1
GEBRAUCHSANLEITUNG ................................................................................................................................4
MODE D’EMPLOI...............................................................................................................................................7
INSTRUCCIONES DE USO .............................................................................................................................10
INSTRUÇÕES PARA O USO...........................................................................................................................13
GEBRUIKSAANWIJZINGEN............................................................................................................................16
BRUGSANVISNING .........................................................................................................................................19
BRUKSANVISNING..........................................................................................................................................22
BRUKERVEILEDNING.....................................................................................................................................25
KÄYTTÖOHJEET .............................................................................................................................................28
PDHGIES CRHSEWS ...........................................................................................................................................31
HASZNÁLATI UTASÍTÁS.................................................................................................................................34
INSTRUKCJA UZYTKOWANIA........................................................................................................................37
PŘÍRUČKA K POUŽITÍ.....................................................................................................................................40
NÁVOD K POUŽITIU........................................................................................................................................43
NAVODILA ZA UPORABO...............................................................................................................................46
INSTRUCTIONS FOR USE..............................................................................................................................49
TECHNICAL INFORMATION...........................................................................................................................52
DESCRIPTION OF THE TURBO-V 81-M....................................................................................52
Pump Description ..............................................................................................................52
TECHNICAL SPECIFICATION ....................................................................................................53
TURBO-V 81-M OUTLINE ...........................................................................................................54
INLET SCREEN INSTALLATION ................................................................................................56
HEATER BAND INSTALLATION.................................................................................................57
AIR COOLING KIT INSTALLATION ............................................................................................57
WATER COOLING KIT INSTALLATION .....................................................................................58
VENT ACCESSORIES.................................................................................................................59
VIBRATION ISOLATOR INSTALLATION....................................................................................60
TYPICAL LAYOUT DIAGRAM.....................................................................................................60
With Navigator Controller...................................................................................................60
With Standard Rack Controller ..........................................................................................61
Connection A - HIGH VACUUM FLANGE.........................................................................61
Connection configurations .................................................................................................62
Connection B - FORE-VACUUM PUMP............................................................................62
Connection C - ELECTRICAL............................................................................................62
PUMP USED IN PRESENCE OF MAGNETIC FIELDS ..............................................................63
ACCESSORIES AND SPARE PARTS ........................................................................................63
VENT VALVE MODEL SELECTION TABLE ...............................................................................63
INSTRUCTIONS FOR USE
49/63 87-900-983-01(D)
Safety Guideline
for
Turbomolecular Pumps
Turbomolecular pumps as described in the following operating manual contain a large
amount of kinetic energy due to the high rotational speed in combination with the specific
mass of their rotors.
In case of a malfunction of the system for example rotor/stator contact or even a rotor crash
the rotational energy may be released.
WARNING!
To avoid damage to equipment and to prevent injuries to operating
personnel the installation instructions as given in this manual should be
strictly followed!
INSTRUCTIONS FOR USE
50/63 87-900-983-01(D)
GENERAL INFORMATION
This equipment is destined for use by professionals. The user
should read this instruction manual and any other additional
information supplied by Varian before operating the equipment.
Varian will not be held responsible for any events occurring due
to non-compliance, even partial, with these instructions, im-
proper use by untrained persons, non-authorized interference
with the equipment or any action contrary to that provided for by
specific national standards.
The Turbo-V 81-M is a turbo-molecular pump for high and ultra-
high vacuum applications which can pump any type of non-
corrosive gas or gas compound. It is not suitable for pumping
liquids or solid particles.
The pumping action is obtained through a high speed turbine
(max. 80000 rpm) driven by a high-performance 3-phase elec-
tric motor. The Turbo-V 81-M is free of contaminating agents
and, therefore, is suitable for applications requiring a "clean"
vacuum.
The following paragraphs contain all the information necessary
to guarantee the safety of the operator when using the equip-
ment. Detailed information is supplied in the appendix "Techni-
cal Information".
This manual uses the following standard protocol:
WARNING!
The warning messages are for attracting the attention of the
operator to a particular procedure or practice which, if not fol-
lowed correctly, could lead to serious injury.
!CAUTION
The caution messages are displayed before procedures which,
if not followed, could cause damage to the equipment.
NOTE
The notes contain important information taken from the text.
STORAGE
In order to guarantee the maximum level of performance and
reliability of Varian Turbomolecular pumps, the following guide-
lines must be followed:
• when shipping, moving and storing pumps, the following
environmental specifications should not be exceeded:
• temperature range: -20 °C to 70 °C
• relative humidity range: 0 to 95% (non condensing)
• the turbomolecular pumps must be always soft-started
when received and operated for the first time by the cus-
tomer
• the shelf life of a turbomolecular pump is 10 months from
the shipping date.
!CAUTION
If for any reason the shelf life time is exceeded, the pump has
to be returned to the factory. Please contact the local Varian
Vacuum Sales and Service representative for informations.
PREPARATION FOR INSTALLATION
The Turbo-V 81-M is supplied in a special protective packing. If
this shows signs of damage which may have occurred during
transport, contact your local sales office.
When unpacking the pump, be sure not to drop it and avoid any
kind of sudden impact or shock vibration to it.
Do not dispose of the packing materials in an unauthorized
manner. The material is 100% recyclable and complies with
EEC Directive 85/399.
!CAUTION
In order to prevent outgassing problems, do not use bare hands
to handle components which will be exposed to vacuum. Al-
ways use gloves or other appropriate protection.
NOTE
Normal exposure to the environment cannot damage the Turbo-
V 81-M. Nevertheless, it is advisable to keep it closed until it is
installed in the system, thus preventing any form of pollution by
dust.
INSTALLATION
! CAUTION!
Do not remove the adhesive and protective cap before connect-
ing the turbopump to the system.
Do not install or use the pump in an environment exposed to
atmospheric agents (rain, snow, ice), dust, aggressive gases,
or in explosive environments or those with a high fire risk. Dur-
ing operation, the following environmental conditions must be
respected:
− maximum pressure: 2 bar above atmospheric pressure
− temperature: from +5 °C to +35 °C (see the diagram pres-
sure-temperature in the appendix “Technical Information”)
− relative humidity: 0 - 95% (non-condensing)
In the presence of magnetic fields the pump must be protected
using a ferromagnetic shield. See the appendix "Technical In-
formation" for detailed information.
INSTRUCTIONS FOR USE
51/63 87-900-983-01(D)
The Turbo-V 81-M pumps must be used in conjunction with one
of the suitable Varian controller and they must be connected to
a primary pump (see "Technical Information").
The available controllers are the following:
- Rack controller 81-AG: 969-8988
- Rack controller 81-AG RS232/485: 969-8989
- Rack controller 81-AG Profibus: 969-8990
- PCB 24 V: 969-9538
- Navigator Controller 81AG 24 Vdc: 969-8995
- Navigator Controller 81AG 100-240 Vac: 969-8996
The Turbo-V 81-M can be installed in any position. Fix the
Turbo-V 81-M in a stable position connecting the inlet flange of
the turbopump to a fixed counter-flange capable of withstanding
a torque of 250 Nm around its axis.
For example the ISO 63 flange can be fixed using high strength
steel clamps (as Varian model IC 63250 DCMZ).
The following table shows the necessary number of clamps and
the relevant fixing torque.
FLANGE FIXING
DEVICE
N. FIXING
TORQUE
ISO 63 M10 clamps 4 22 Nm
The turbopump with ConFlat inlet flange must be fixed to the
vacuum chamber by means of the appropriate Varian hard-
ware. See the appendix "Technical Information" for a detailed
description.
NOTE
The Turbo-V 81-M cannot be fixed by means of its base.
!CAUTION
The Turbo-V 81-M belongs to the second installation (or over-
voltage) category as per directive EN 61010-1. Connect the
device to a mains line that satisfy the above category.
For installation of optional accessories, see "Technical Informa-
tion".
USE
All the instructions to correctly use the turbopump are contained in
the controller manual. Read carefully this manual before use the
pump.
To obtain better limit pressures it is possible to heat the pump.
While heating the vacuum chamber, the temperature of the inlet
flange must not exceed 120 °C for a ConFlat flange and 80 °C for a
ISO flange.
While heating always use the water cooling.
WARNING!
Never use the turbopump when the inlet flange is not con-
nected to the vacuum chamber or is not blanked.
Do not touch the turbopump or any of its accessories during the
heating process. The high temperatures may cause burns.
!CAUTION
Avoid impacts, oscillations or harsh movements of the pump
when in operation. The bearings may become damaged.
Use air or inert gas free from dust or particles for venting the
pump. The pressure at the vent port must be less than 2 bar
(above atmospheric pressure).
For pumping aggressive gases, these pumps are fitted with a spe-
cial port to allow a steady flow of inert gas (like Nitrogen or Helium)
for pump bearing protection (see the appendix "Technical Informa-
tion").
WARNING!
When employing the pump for pumping toxic, flammable, or
radioactive gases, please follow the required procedures for
each gas disposal.
Do not use the pump in presence of explosive gases.
MAINTENANCE
The Turbo-V 81-M series pumps does not require any mainte-
nance. Any work performed on the system must be carried out
by authorized personnel.
WARNING!
Before carrying out any work on the system, disconnect it from
the mains, vent the pump by opening the appropriate valve,
wait until the rotor has stopped turning and wait until the sur-
face temperature of the pump falls below 50 °C.
In the case of breakdown, contact your local Varian service
center who can supply a reconditioned system to replace that
broken down.
NOTE
Before returning the system to the constructor for repairs, or
replacement with a reconditioned unit, the "Health and Safety"
sheet attached to this instruction manual must be filled-in and
sent to the local sales office. A copy of the sheet must be in-
serted in the system package before shipping.
If a system is to be scrapped, it must be disposed of in accor-
dance with the specific national standards.
DISPOSAL
Meaning of the "WEEE" logo found in labels
The following symbol is applied in accordance with the EC
WEEE (Waste Electrical and Electronic Equipment) Directive.
This symbol (valid only in countries of the European Com-
munity) indicates that the product it applies to must NOT be
disposed of together with ordinary domestic or industrial waste
but must be sent to a differentiated waste collection system.
The end user is therefore invited to contact the supplier of the
device, whether the Parent Company or a retailer, to initiate the
collection and disposal process after checking the contractual
terms and conditions of sale.
TECHNICAL INFORMATION
52/63 87-900-983-01(D)
DESCRIPTION OF THE TURBO-V 81-M
The Turbo-V 81-M pump is available in four ver-
sions. The difference among the four versions lies
purely in the high vacuum connection.
The four versions are:
− Model 969-8901 with ISO 63 high vacuum
flange;
− Model 969-8902 with KF 40 NW high vacuum
flange;
− Model 969-8903 with ConFlat 4.5" external di-
ameter high vacuum flange;
− Model 969-8904 with ConFlat 2.75” external
diameter high vacuum flange.
Pump Description
The pump consists of a high frequency motor driv-
ing a turbine fitted with 9 bladed stages and 3
Macrotorr stages. The turbine rotates in an anti-
clockwise direction when viewed from the high
vacuum flange end.
The turbine is made of high-strength aluminium
alloy, machined from a single block.
Model 969-8901 Model 969-8902
Model 969-8903 Model 969-8904
Proceeding from the high vacuum to the forevac-
uum region, the turbine stages sequence is:
• 1st stage with a blade angle of 40°,
• 2nd stage with a blade angle of 30°,
• 3rd stage with a blade angle of 24°,
• 4th and 5th stages with a blade angle of 18°,
• 6th stage with a blade angle of 14°;
• 7th, 8th and 9th stages with a blade angle of
12°.
The Macrotorr stages are in the form of three
discs.
The turbine rotor is supported by permanently lu-
bricated high precision ceramic ball bearings in-
stalled on the forevacuum side of the pump.
The static blades of the stator are made of
stainless steel. These are supported and accu-
rately positioned by spacer rings.
The Macrotorr stators are in the form of self-
positioning machined discs with pumping channels
and an opening restricted by the corresponding
rotor discs. These are made of aluminium alloy.
During normal operation, the motor is fed with a
voltage of 54 Vac three-phase at 1350 Hz (max).
To reduce losses during start-up to a minimum,
the frequency increases according to a ramp with
a higher initial voltage/frequency ratio.
The pump can be water cooled or air cooled: in the
first case the customer can use a dedicated exter-
nal plate made of nickel-plated brass, in the sec-
ond case an external optional fan is available.
A thermistor sensor is mounted near the upper
bearing to prevent the pump from overheating.
The pump is balanced after assembly with a resid-
ual vibration amplitude less than 0.01 µm.
The pump can operate in any position and can be
supported on the high vacuum flange. The con-
nection of the forevacuum on the side of the pump
is a KF 16 NW flange.
PUMP
CONTROLLER
CONNECTOR
FOREPUMP
CONNECTOR
TECHNICAL INFORMATION
53/63 87-900-983-01(D)
TECHNICAL SPECIFICATION
Pumping speed With ISO 63 or
CFF 4.5”
N
2
: 77 l/s
He: 65 l/s
H
2
: 50 l/s
With KF 40 NW
or CFF 2.75”
N
2
: 50 l/s
He: 56 l/s
H
2
: 46 l/s
Compression ratio N
2
: 3 x 10
8
He: 8 x 10
4
H
2
: 7 x 10
3
Base pressure *
(with recommended
forepump)
mechanical:
5 x 10
-10
mbar (3.8 x 10
-10
Torr)
diaphragm:
5 x 10
-9
mbar (3.8 x 10
-9
Torr)
Inlet flange ISO 63 KF 40 NW
CFF 4.5” O.D. CFF 2.75” O.D.
Foreline flange KF16 NW
Rotational speed 1350 Hz (max)
Start-up time < 60 seconds
Cooling
requirements
Natural air convection
Forced air or water optional
Recommended
forepump
mechanical: Varian DS 42 – DS 102
dry pump: Varian SH 100
Operating position any
Coolant water flow: 10 l/h (0.05 GPM)
temperature: + 15 °C to + 35 °C
pressure: 2 to 4 bar (30 to 60 Psi)
Operating ambient
temperature with
natural air convec-
tion
+5 °C to +25 °C
Operating ambient
temperature with
forced air cooling or
water
+5 °C to +35 °C
Bakeout temperature 120° C at inlet flange max. (CF flange)
80° C at inlet flange max. (ISO flange)
Vibration level
< 0.01 µm at inlet flange
(displacement)
Noise level
≤ 45 dB (A) at 1 meter
Compliance with: UNI EN 292-1
UNI EN 292-2
EN-CENELEC 55011
IEC 1000-4-2 (ex 801-2)
IEC 1000-4-3 (ex 801-3)
IEC 1000-4-4 (ex 801-4)
EN 61010-1 (IEC 1010-1)
EN 1012-2
Storage temperature -20° C to +70° C
Input 60 Vac, three phase,
1350 Hz (max)
50 W max
Lubricant permanent lubrication
Installation category II
Pollution degree 2
Storage temperature - 20° C to + 70° C
Weight kg (lbs):
ISO 63: 1.99 (4.39)
KF 40: 1.96 (4.32)
CFF 4.5”: 2.96 (6.53)
CFF 2.75”: 2.77 (6.11)
* (According to standard DIN 28 428, the base pressure is that
measured in a leak-free test dome, 48 hours after the comple-
tion of test dome bake-out, with a Turbopump fitted with a Con-
Flat flange and using the recommended pre-vacuum pump)
NOTE
When the Turbo-V 81-M has been stored at a tem-
perature less than 5°C, wait until the system has
reached the above mentioned temperature.
TECHNICAL INFORMATION
54/63 87-900-983-01(D)
TURBO-V 81-M OUTLINE
The following figure shows the Turbo-V 81-M outlines (dimensions are in inches [mm]).
Turbo-V 81-M outline
TECHNICAL INFORMATION
55/63 87-900-983-01(D)
Graph of pumping speed vs inlet pressure with a 8 m
3
/h mechanical pump
Graph of compression ratio vs foreline pressure
TECHNICAL INFORMATION
56/63 87-900-983-01(D)
INLET SCREEN INSTALLATION
The inlet screens mod. 969-9300 and 969-9309
prevent the blades of the pump from being dam-
aged by debris greater than 0.7 mm diameter.
The inlet screen, however, does reduce the pump-
ing speed by about 10%.
The inlet screen is fitted in the upper part of the
pump, as shown in the figure.
The screen can be mounted on each pump.
The screen can be removed as shown in the fol-
lowing figure.
The following figure shows the overall flange di-
mensions with the protection screen fitted on
pump with ISO flange and pump with CFF flange
(dimensions are in inches [mm]).
TECHNICAL INFORMATION
57/63 87-900-983-01(D)
HEATER BAND INSTALLATION
The heater band model 969-9801 and 969-9802
can be used to heat the pump casing when a
bakeout is needed.
The heater band is applied to the upper part of the
pump casing, as shown in the figure, and heats it
to a temperature of about 80° C.
The heater band must be mounted such that there
is perfect thermal contact with the pump wall to ob-
tain fast and efficient heating.
Switch on the heater while the turbopump is in op-
eration. In the event of turbopump overheat, the
pump will be automatically cut out by the thermis-
tor sensor.
NOTE
The turbopump must be "baked" only when operat-
ing with an inlet pressure less than 10
-4
mbar and
with water cooling.
! CAUTION
If the chamber of the system is "baked" at a high
temperature, a shield should be installed to pre-
vent thermal radiation heating the high vacuum
flange on the pump. The maximum temperature
allowed for the inlet flange is 120° C.
AIR COOLING KIT INSTALLATION
An air cooling kit (mod. 969-9290) is available for
cooling the pump during heavy operational condi-
tions and whenever the natural air convection is
not sufficient.
Fan specifications:
− air flow: 12.8 l/s (27.1 CFM)
− input voltage: 24 Vdc
− dimensions: 60 x 60 x 25 mm
− power: 2.60 W
The fan bracket is shaped so that it can be
mounted close to the pump and in different posi-
tions.
To fix the fan to the Turbo-V 81-M case execute
the following procedure (see the following figure):
1. Fix the fan to the suitable bracket by means of
the furnished screws;
2. Fix the bracket to the pump body;
3. Connect the fan supply to the P4 connector of
the controller.
TECHNICAL INFORMATION
58/63 87-900-983-01(D)
WATER COOLING KIT INSTALLATION
Two types of water cooling kits are available to be
mounted when the pump is used under heavy load
conditions or when air cooling is insufficient.
The two model part numbers are: 969-9823 (me-
tallic model), and 969-9824 (plastic model).
! CAUTION
The items of the plastic model kit must be assem-
bled as shown in the following figure
The assembled kit must be screwed into the suit-
able holes of the pump body with a recommended
closing torque of 5 Nm.
The water kit is assembled as shown in the figure.
TECHNICAL INFORMATION
59/63 87-900-983-01(D)
1. Connect the plate to the pump bottom with four
screws M3x20
2. Assemble the metal or the plastic kit as shown.
Cooling may be carried out either through an open
circuit with eventual discharge of the water, or us-
ing a closed circuit cooling system.
The water temperature must be between +15 °C
and +35 °C, with an inlet pressure between 2 and
4 bar.
NOTE
The water electrical conductance must be
≤
500
µ
s/cm. When the conductance is higher, in closed
water circuit, the use of up to 20% of Ethyl-Glycole
is suggested.
VENT ACCESSORIES
The vent valve allows to avoid undesired venting
of the pump during temporary power failure and
enables an automatic vent operation.
There are several vent valves available and each
vent valve has to be driven by its own control unit.
NOTE
Refer to the Vent Valve Model Selection table to
choose the valve and the related control unit.
NOTE
Refer to the control unit manual for the pump-
valve-controller interconnections.
Refer to the vent valve manual and follow the in-
structions to properly vent the turbomolecular
pump.
To install the vent valve, unscrew the threaded
plug (see figure below).
TECHNICAL INFORMATION
60/63 87-900-983-01(D)
Then screw the vent valve into the pump and
tighten it using a 16 mm hexagonal spanner with a
torque of 2.5 Nm.
! CAUTION
Do not overtighten the valve as this may damage
the thread on the pump.
Then connect the cable from the valve to the suit-
able connector on the controller.
VIBRATION ISOLATOR INSTALLATION
Two vibration isolators for ISO and CFF inlet
flange version pumps are available as accesso-
ries.
The two model part numbers are the following:
− model 969-9375 for ISO 63 flange;
− model 969-9376 for CFF 4.5” flange.
They typically reduce the vibration transmitted
from the Turbo-V 81-M to the system by a factor of
20.
Please refer to the relevant instruction manual.
TYPICAL LAYOUT DIAGRAM
With Navigator Controller
1. Turbo-V Navigator controller
2. Vent valve
3. Vacuum pump shut-off valve (optional)
4. System vent valve (optional)
5. Vacuum chamber
6. Ionization gauge
7. Fore-vacuum pump connecting flange
8. Oil mist eliminator
9. Fore-vacuum pump with internal one-way valve
10. Fore-vacuum pump control relay
11. Connection for water cooling
12. Roughing line with valve (optional)
13. Turbopump
14. Fan
15. Flexible connection
TECHNICAL INFORMATION
61/63 87-900-983-01(D)
With Standard Rack Controller
1. Turbo-V standard rack controller
2. Vent valve
3. Vacuum pump shut-off valve (optional)
4. System vent valve (optional)
5. Vacuum chamber
6. Ionization gauge
7. Fore-vacuum pump connecting flange
8. Oil mist eliminator
9. Fore-vacuum pump with internal one-way valve
10. Fore-vacuum pump control relay
11. Connection for water cooling
12. Roughing line with valve (optional)
13. Turbopump
14. Flexible connection
Connection A - HIGH VACUUM FLANGE
To connect the Turbo-V 81-M pump to the ISO
inlet flange, remove the outer ring and position the
centering ring as shown in the figure.
Then fix the two flanges with the clamps or claws
as shown in the figure.
For ConFlat flange connections we recommend
using Varian hardware.
To facilitate assembly and dismantling, apply Fel-
pro C-100 high temperature lubricant to the screw
threads protruding from the flange and between
the nuts and flange.
Attach the units and tighten each one in turn. Re-
peat the sequential tightening until the flange faces
meet.
! CAUTION
Exercise care when tightening nuts and bolts to
avoid creating dents in the envelope as this may
cause the pump rotor to lock.
TECHNICAL INFORMATION
62/63 87-900-983-01(D)
Connection configurations
Connection B - FORE-VACUUM PUMP
A flange KF 16 NW is available to connect the
Turbo-V 81-M pump to the fore-vacuum pump. A
hose or vacuum approved pipe can be used. If a
rigid pipe is used, any vibration generated by the
mechanical pump must be eliminated through the
use of bellows.
NOTE
The Turbo-V 81-M pump is characterized by its
high compression ratio also for oil vapors. When
using a mechanical oil-sealed pump, it is advisable
to install a suitable trap between the turbopump
and the fore-vacuum pump in order to prevent oil
backstreaming.
Connection C - ELECTRICAL
The turbopump is connected to the controller
through an 6-pin connector. Pins B, C and D are
the 3-phase supply to the motor, pins A and F are
connected to the temperature sensor (NTC type,
30 KΩ resistance at 25° C) and pin E is connected
to the pump ground.
If the temperature sensor is disconnected, the
pump will not start. To prevent damage to the
pump when the temperature exceeds 60° C, the
sensor automatically cuts out the power supply.
TECHNICAL INFORMATION
63/63 87-900-983-01(D)
PUMP USED IN PRESENCE OF MAGNETIC
FIELDS
Magnetic fields induce eddy currents in the rotor of
a turbomolecular pump that tend to oppose to its
rotation.
The result is increased electrical power consump-
tion by the motor, most of which is dissipated in
the rotor.
Since the rotor is not in contact with the stator the
above power can leave the rotor mainly by radia-
tion and hence the rotor may be overheated while
static parts of the pump remain cool.
This effect is strongly dependant from the inten-
sity, time function and distribution of the magnetic
field.
In general, therefore, an increase in pump current
can be expected.
If this increase is lower than 50% of the current
value drawn by the motor in high vacuum opera-
tion, no particular problem should be expected.
However if the effect is grater, than the case
should be carefully reviewed by Varian's specialist.
As a matter of fact, in case of high magnetic fields,
also important forces might be generated and ap-
plied to the rotor.
ACCESSORIES AND SPARE PARTS
DESCRIPTION PART NUMBER
Inlet screen, DN 40 969-9309
Inlet screen, DN 63 969-9300
Heater band 220 V 969-9801
Heater band 120 V 969-9802
Metallic water cooling kit 969-9823
Plastic water cooling kit 969-9824
Air cooling kit (0.5 m cable) 969-9290
Air cooling kit extension cable (5 m) 969-9940
Pump extension cable 969-9942
Vibration damper DN 63 969-9375
Vibration damper CFF 4.5" 969-9376
Mechanical pump DS 102 949-9315
Mechanical pump DS 42 949-9309
Dry scroll SH 100 SH01001 UNIV
Dry scroll SH 110 SH01101 UNIV
Rack controller 81-AG base 969-8988
Rack controller 81-AG RS232/485 969-8989
Rack controller 81-AG Profibus 969-8990
PCB 24 V 969-9538
Turbo-V 81-AG Navigator Controller
24 Vdc
969-8995
Turbo-V 81-AG Navigator Controller
100-240 Vac
969-8996
For a complete overview of Varian's extensive
product lines, please refer to the Varian catalog.
VENT VALVE MODEL SELECTION TABLE
CONTROL UNIT MODEL VENT VALVE
PART NUMBER
Turbo-V 81-AG Navigator Controller
(cable 0.7 m)
(any version)
N.O. 969-9844
Turbo-V 81-AG Rack Controller
(cable 0.7 m)
(any version)
N.O. 969-9844
Controller TV70 Navigator
(P/N 969-8970, 969-8971)
969-9834
Turbo-V 70 Rack controller
(P/N 969-9405, 969-9505)
969-9843
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Varian 969-8902 Manuale utente
- Tipo
- Manuale utente
- Questo manuale è adatto anche per
in altre lingue
- English: Varian 969-8902 User manual
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