Brooks 5700 Istruzioni per l'uso

Installation and Operation Manual

X-TMF-5700-MFM-eng

Part Number: 541B064AAG

July, 2017

Brooks

®

5700 Electronic Flowmeter

Brooks

®

MassRate

TM

5700

Electronic Flowmeter

Installation and Operation Manual

X-TMF-5700-MFM-eng

Part Number: 541B064AAG

July, 2017

Brooks

®

5700 Electronic Flowmeter

ESD (Electrostatic Discharge)

CAUTION: This instrument contains electronic components that are susceptible to damage by static electricity. Proper handling procedures must be observed

during the removal, installation or other handling of internal circuit boards or devices.

Handling Procedure:

1. Power to unit must be removed.

2. Personnel must be grounded, via a wrist strap or other safe, suitable means before any printed circuit card or other internal device is installed,

removed or adjusted.

3. Printed circuit cards must be transported in a conductive container. Boards must not be removed from protective enclosure until immediately before

installation. Removed boards must immediately be placed in protective container for transport, storage or return to factory.

Comments

This instrument is not unique in its content of ESD (electrostatic discharge) sensitive components. Most modern electronic designs contain components

that utilize metal oxide technology (NMOS, SMOS, etc.). Experience has proven that even small amounts of static electricity can damage or destroy these

devices. Damaged components, even though they appear to function properly, exhibit early failure.

Brooks Instrument designs, manufactures and tests its products to meet many national and international standards. These products must be properly

installed, operated and maintained to ensure they continue to operate within their normal specifications. The following instructions must be adhered to

and integrated into your safety program when installing, operating and maintaining Brooks Instrument products.

• To ensure proper performance, use qualified personnel to install, operate, update, program and maintain the product.

• Read all instructions prior to installing, operating and servicing the product. If this instruction manual is not the correct manual, please see back cover

for local sales office contact information. Save this instruction manual for future reference.

WARNING: Do not operate this instrument in excess of the specifications listed in the Instruction and Operation Manual. Failure to heed

this warning can result in serious personal injury and / or damage to the equipment.

• If you do not understand any of the instructions, contact your Brooks Instrument representative for clarification.

• Follow all warnings, cautions and instructions marked on and supplied with the product.

WARNING: Prior to installation ensure this instrument has the required approval ratings to meet local and national codes. Failure to heed this warning can

result in serious personal injury and / or damage to the equipment.

• Install your equipment as specified in the installation instructions of the appropriate instruction manual and per applicable local and national codes.

Connect all products to the proper electrical and pressure sources.

• Operation: (1) Slowly initiate flow into the system. Open process valves slowly to avoid flow surges. (2) Check for leaks around the flow meter inlet

and outlet connections. If no leaks are present, bring the system up to the operating pressure.

• Please make sure that the process line pressure is removed prior to service. When replacement parts are required, ensure that qualified people use

replacement parts specified by Brooks Instrument. Unauthorized parts and procedures can affect the product's performance and place the safe

operation of your process at risk. Look-alike substitutions may result in fire, electrical hazards or improper operation.

• Ensure that all equipment doors are closed and protective covers are in place to prevent electrical shock and personal injury, except when

maintenance is being performed by qualified persons.

WARNING: For liquid flow devices, if the inlet and outlet valves adjacent to the devices are to be closed for any reason, the devices must be completely

drained. Failure to do so may result in thermal expansion of the liquid that can rupture the device and may cause personal injury.

All pressure equipment with an internal pressure greater than 0.5 bar (g) and a size larger than 25mm or 1" (inch) falls under the Pressure Equipment Directive (PED).

• The Specifications Section of this manual contains instructions related to the PED directive.

• Products described in this manual are in compliance with EN directive 2014/34/EU.

• All Brooks Instrument Flowmeters fall under fluid group 1.

• Products larger than 25mm or 1" (inch) are in compliance with PED category I, II or III.

• Products of 25mm or 1" (inch) or smaller are Sound Engineering Practice (SEP).

The Brooks Instrument (electric/electronic) equipment bearing the CE mark has been successfully tested to the regulations of the Electro Magnetic

Compatibility (EMC directive 2014/30/EU).

Special attention however is required when selecting the signal cable to be used with CE marked equipment.

Quality of the signal cable, cable glands and connectors:

Brooks Instrument supplies high quality cable(s) which meets the specifications for CE certification.

If you provide your own signal cable you should use a cable which is overall completely screened with a 100% shield.

“D” or “Circular” type connectors used should be shielded with a metal shield. If applicable, metal cable glands must be used providing cable screen clamping.

The cable screen should be connected to the metal shell or gland and shielded at both ends over 360 Degrees.

The shield should be terminated to an earth ground.

Card Edge Connectors are standard non-metallic. The cables used must be screened with 100% shield to comply with CE certification.

The shield should be terminated to an earth ground.

For pin configuration : Please refer to the enclosed Instruction Manual.

European Pressure Equipment Directive (PED)

European Electromagnetic Compatibility (EMC)

Essential Instructions

Read before proceeding!

Installation and Operation Manual

X-TMF-5700-MFM-eng

Part Number: 541B064AAG

July, 2017

Brooks

®

5700 Electronic Flowmeter

Dear Customer,

We appreciate this opportunity to service your flow measurement and control requirements with a Brooks

Instrument device. Every day, flow customers all over the world turn to Brooks Instrument for solutions to their

gas and liquid low-flow applications. Brooks provides an array of flow measurement and control products for

various industries from biopharmaceuticals, oil and gas, fuel cell research and chemicals, to medical devices,

analytical instrumentation, semiconductor manufacturing, and more.

The Brooks product you have just received is of the highest quality available, offering superior performance,

reliability and value to the user. It is designed with the ever changing process conditions, accuracy requirements

and hostile process environments in mind to provide you with a lifetime of dependable service.

We recommend that you read this manual in its entirety. Should you require any additional information concerning

Brooks products and services, please contact your local Brooks Sales and Service Office listed on the back cover

of this manual or visit www.BrooksInstrument.com

Yours sincerely,

Brooks Instrument

Installation and Operation Manual

X-TMF-5700-MFM-eng

Part Number: 541B064AAG

July, 2017

Brooks

®

5700 Electronic Flowmeter

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i

Installation and Operation Manual

X-TMF-5700-MFM-eng

Part Number: 541B064AAG

July, 2017 Brooks

®

5700 Electronic Flowmeter

Contents

Paragraph Page

Number Number

Section 1 Introduction

1-1 Purpose ............................................................................................................................................ 1-1

1-2 Specifications ................................................................................................................................... 1-2

Section 2 Installation

2-1 General.............................................................................................................................................2-1

2-2 Receipt of Equipment ....................................................................................................................... 2-1

2-3 Recommended Storage Practice......................................................................................................2-1

2-4 Return Shipment .............................................................................................................................. 2-1

2-5 Transit Precautions .......................................................................................................................... 2-2

2-6 Removal from Storage......................................................................................................................2-2

2-7 Installation Tips................................................................................................................................. 2-2

2-8 In-Line Filter ..................................................................................................................................... 2-4

2-9 Positive Shut-Off Valve.....................................................................................................................2-4

2-10 Gas Connections.............................................................................................................................. 2-4

2-11 Electrical Interfacing.........................................................................................................................2-5

2-12 Zero Adjustment ...............................................................................................................................2-5

Section 3 Operation

3-1 Basic Operation................................................................................................................................ 3-1

3-2 Output Signal....................................................................................................................................3-1

3-3 Process Flow Rate ........................................................................................................................... 3-1

3-4 Use of Conversion Tables ................................................................................................................3-2

Section 4 Maintenance

4-1 General.............................................................................................................................................4-1

4-2 Troubleshooting................................................................................................................................ 4-1

Section 5 Parts List

5-1 General.............................................................................................................................................5-1

SectionA Essential Instructions.............................................................................................................. A1

Warranty, Local Sales/Service Contact Information....................................................................... Back Cover

Figures

Figure Page

Number Number

2-1 Model MassRate 5700 Dimensions/Electrical Connector.................................................................2-3

5-1 Parts drawing ................................................................................................................................... 5-1

Tables

Table Page

Number Number

1-1 Specifications ................................................................................................................................... 2-4

2-1 Recommended Filter Size ................................................................................................................2-4

3-1 Output vs. Flow rate .........................................................................................................................3-1

3-2 Nitrogen Based Conversion Factors................................................................................................. 3-3

4-1 Bench Troubleshooting.....................................................................................................................4-3

4-2 Sensor Troubleshooting ...................................................................................................................4-3

5-1 Model MassRate 5700 Replacement Parts List ...............................................................................5-1

ii

Installation and Operation Manual

X-TMF-5700-MFM-eng

Part Number: 541B064AAG

July, 2017

Brooks

®

5700 Electronic Flowmeter

Contents

THIS PAGE WAS

INTENTIONALLY

LEFT BLANK

1-1

Installation and Operation Manual

X-TMF-5700-MFM-eng

Part Number: 541B064AAG

July, 2017

Brooks

®

5700 Electronic Flowmeter

Section 1 Introduction

1-1 Purpose

The Brooks

®

MassRate

TM

5700 Electronic Flowmeter is a mass flow

measurement device designed for repeatably measuring flows of gases.

The MassRate 5700 produces a stable gas flow indication which eliminates

the need to continuously monitor and compensate for changing gas

pressures and temperatures. This instruction manual is intended to provide

the user with all the information necessary to install, operate and maintain

the Brooks MassRate 5700 Flowmeter. This manual is organized into the

following sections:

Section 1 - Introduction

Section 2 - Installation

Section 3 - Operation

Section 4 - Maintenance

Section 5 - Parts List

Section A - Essential Instructions

It is recommended that this manual be read in its entirety before attempting

to operate the MassRate 5700.

1-2 Specifications (See Table 1-1)

1-2

Installation and Operation Manual

X-TMF-5700-MFM-eng

Part Number: 541B064AAG

July, 2017Brooks

®

5700 Electronic Flowmeter

Section 1 Introduction

SpecificationsSpecifications

Specifications

57005700

5700

Standard Flow Ranges*Standard Flow Ranges*

Standard Flow Ranges* 0-10, 0-20, 0-50, 0-100, 0-200, 0-500 ml/min

0-1, 0-2, 0-5, 0-10, 0-20, 0-50 liters/min

RangeabilityRangeability

Rangeability 20:1

RepeatabilityRepeatability

Repeatability 0.5% full scale

AccuracyAccuracy

Accuracy 5% full scale including linearity

Temperature SensitivityTemperature Sensitivity

Temperature Sensitivity Zero: less than ±0.075% full scale per degree C

Span: less than ±0.075% full scale per degree C

Pressure SensitivityPressure Sensitivity

Pressure Sensitivity Less than 0.05% per psi (0.0073% per KPa)

Mounting Attitude SensitivityMounting Attitude Sensitivity

Mounting Attitude Sensitivity Less than 0.5% full scale shift after rezeroing

Working PressureWorking Pressure

Working Pressure Up to 150 psig (1034 KPa)

Temperature LimitsTemperature Limits

Temperature Limits Operating: 5 to 65°C

Non-operating: -25 to 100°C

Materials of ConstructionMaterials of Construction

Materials of Construction 304 and 316 Stainless Steel

ConnectionsConnections

Connections Mechanical: 1/4” FNPT

Electrical: 5-Pin post header horizontal mount AMP 171826-5. The mating connector is AMP 172053-5

PowerPower

Power 11.5 to 15.5 Vdc, 50 mA

Output SignalOutput Signal

Output Signal 0-5 Vdc into 1000 ohms or greater

DimensionsDimensions

Dimensions See Dimensions figure

WeightWeight

Weight 1lb/0.5Kg

*Nitrogen, 760 torr Reference Pressure, Reference Temperature defined by User

Table 1-1 Specifications

2-1

Installation and Operation Manual

X-TMF-5700-MFM-eng

Part Number: 541B064AAG

July, 2017

Brooks

®

5700 Electronic Flowmeter

Section 2 Installation

2-1 General

This section provides installation instructions for the Brooks Model 5700

electronic flowmeter.

2-2 Receipt of Equipment

When the equipment is received, the outside packing case should be

checked for damage incurred during shipment. If the packing case is

damaged, the local carrier should be notified at once regarding his liability.

A report should be submitted to the nearest Brooks Instrument location

listed on the Global Service Network page on our website:

BrooksInstrument.com/GlobalSupportCenters

Remove the envelope containing the packing list. Outside of your clean area,

carefully remove the equipment from the packing case. Make sure spare

parts are not discarded with the packing material. Inspect for damaged or

missing parts.

2-3 Recommended Storage Practice

If intermediate or long-term storage of equipment is required, it is

recommended that the equipment be stored in accordance with the

following:

a. In the original vacuum bag and shipping container.

b. In a sheltered area with the following conditions:

1. Ambient temperature 21°C (70°F) nominal, 32°C (90°F) maximum

and 7°C (45°F) minimum.

2. Relative humidity 45% nominal, 60% maximum and 25% minimum.

2-4 Return Shipment

Prior to returning any instrument to the factory for any reason, visit our

website for instructions on how to obtain a Return Materials Authorization

Number (RMA #) and complete a Decontamination Statement to

accompany it: BrooksInstrument.com/Service. All instruments returned to

Brooks also require a Material Safety Data Sheet (MSDS) for the fluid(s)

used in the instrument. Failure to provide this information will delay

processing of the instrument.

Instrument must have been purged in accordance with the following:

2-2

Installation and Operation Manual

X-TMF-5700-MFM-eng

Part Number: 541B064AAG

July, 2017

Brooks

®

5700 Electronic Flowmeter

Section 2 Installation

2-5 Transit Precautions

To safeguard against damage during transit, transport the instrument to the

installation site in the same container used for transportation from the

factory if circumstances permit.

2-6 Removal from Storage

Upon removal from storage, a visual inspection should be conducted to

verify the condition of the equipment is “as received.” If the equipment has

been in storage in conditions in excess of those recommended (See

Section 2-3), the device should be subjected to a pneumatic pressure test

in accordance with applicable vessel codes.

2-7 Installation Tips (Refer to Figure 2-1)

a. The MassRate 5700 should be located in a clean dry atmosphere

relatively free from shock and vibration.

b. Leave sufficient room for access to the electrical components.

c. The MassRate 5700 Flowmeter can be installed in any position.

However, mounting orientations other than the original horizontal factory

calibration couldresult in a ±0.5% maximum full scale shift after

re-zeroing.

d.When installing flowmeters, be aware that sharp abrupt angles in the

system piping directly upstream of the meter may cause a small shift in

accuracy. If possible, have 10 pipe diameters of straight tubing upstream of

the MassRate

5700 Flowmeter.

2-3

Installation and Operation Manual

X-TMF-5700-MFM-eng

Part Number: 541B064AAG

July, 2017

Brooks

®

5700 Electronic Flowmeter

Section 2 Installation

Figure 2-1 Model MassRate Dimensions/Electrical Connector

Pin Electrical Pin Out

No.

5 Supply Common

4 0-5V Flow Signal Out

3 Not Used

2 0-5V Flow Signal Common

1 +12 to +15Vdc Supply

Fitting Size & Type "X" Dim.

1/8 Compression 5.12 ±.125

[130.0]

1/4 Compression 5.20 ±.125

[132.1]

3/8 Compression 5.30 ±.125

[134.6]

Dimensions in inches [mm]

2-4

Installation and Operation Manual

X-TMF-5700-MFM-eng

Part Number: 541B064AAG

July, 2017

Brooks

®

5700 Electronic Flowmeter

Section 2 Installation

2-8 In-Line Filter

It is recommended that an in-line filter be installed upstream from the

flowmeter to prevent the possibility of any foreign material entering the flow

sensor. Refer to Table 2-1 for recommended filter size. The filter should be

periodically replaced or ultrasonically cleaned.

Flow Rate Filter Size

10,20,50,100 sccm 0.5 micron

200,500 sccm 2 micron

1,2,5 slpm 10 micron

10,20,50 slpm 40 micron

Table 2-1 Recommended Filter Size

2-9 Positive Shut-Off Valve

It is recommended that a positive shut-off valve be installed in-line with the

MassRate 5700. The position of this valve, upstream or downstream of the

meter will depend upon the specific application.

2-10 Gas Connections

The MassRate 5700 comes with integrally machined 1/4" female NPT

mechanical connections. Optional 1/8", 1/4", or 3/8" compression fittings

may be supplied with the meter. For flow rates above 10 slpm, 3/8"

compression fittings are recommended. It is recommended that 1/4" wide

pipe tape, not pipe dope, be used to install fittings or adapters into this

meter. The following steps should be followed during mechanical

installation:

a.Clean both male and female tapered thread ends to ensure removal of

dirt or previously applied antiseize compound or tape.

b.Beginning at the first thread, wrap tape in the direction of the male

tapered thread spiral, and join with a slight overlap. (Two wraps are

suggested for stainless steel tapered pipe threads.)

c.Make sure tape does not overhang the first thread, as the tape could

shred and get into the fluid system.

d.Cut off excess tape. Draw the free end of the tapearound the threads

tautly so that it conforms to the threads. Press firmly at the overlay point.

The connection is now ready for proper make-up.

The entire system should be pressurized and leak tested with a dry inert

gas prior to operation.

2-5

Installation and Operation Manual

X-TMF-5700-MFM-eng

Part Number: 541B064AAG

July, 2017

Brooks

®

5700 Electronic Flowmeter

Section 2 Installation

2-11 Electrical Interfacing

To insure proper operation, the MassRate 5700 must be connected per

Figure 2-1. A positive 12 to 15 Vdc power source must be connected to pin

1 and common to pin 5. Under normal operating conditions this meter will

draw less than 50 mA. The flow output is a linear 0-5 Vdc signal on pins 2

and 4.

The electrical connector is a 5 pin post header horizontal mount AMP

171826-5. The recommended mating connector is AMP 172053-5.

NOTE: IF MassRate 5700 is going to be located in a noisy

environment (motors, pumps, etc.), it is recommended that the body

is connected to earth ground. This can be done by attaching a

ground wire to either mounting screw.

2-12 Zero Adjustment

Each MassRate 5700 is factory adjusted to provide a 0 ±10mVdc signal at

zero flow. If readjustment is necessary refer to Figure 2-1 for zero

potentiometer location and follow instructions a through f listed below.

a.Mount the flowmeter in its final configuration.

b.Close the in-line positive shutoff valve. Turn on the gas supply and/or

vacuum system.

c.Apply 12 to 15 Vdc and allow 20 minutes for the instrument to warmup

and stabilize.

d.Using a suitable voltmeter check the flowmeter output signal on pins 2

and 4.

e.If the output is not 0 ±10 mVdc check the system for leaks.

f. If no leaks are found adjust the zero potentiometer until the desired

output is obtained.

2-6

Installation and Operation Manual

X-TMF-5700-MFM-eng

Part Number: 541B064AAG

July, 2017

Brooks

®

5700 Electronic Flowmeter

Section 2 Installation

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3-1

Installation and Operation Manual

X-TMF-5700-MFM-eng

Part Number: 541B064AAG

July, 2017

Brooks

®

5700 Electronic Flowmeter

Section 3 Operation

3-1 Basic Operation

a. Close the in-line positive shutoff valve.

b. Turn on the gas supply and/or vacuum system.

c. Apply 12 to 15 Vdc and allow 20 minutes for the instrument to

warmup and stabilize.

d. Adjust zero potentiometer if necessary. Refer to Zero Adjustment

Section 2-8.

e. Open the valve to allow flow to pass through the meter. Monitor the

flow output signal.

3-2 Output Signal

The flow output from the MassRate 5700 is a 0-5 Vdc signal linear with

flow rate. Some output versus flow points are shown in Table 3-1 for

reference.

3-3 Process Flow Rate

Each MassRate 5700 is calibrated on Nitrogen for a specific full scale flow

rate. That flow rate is indicated on the label of the instrument. If a process

gas other than Nitrogen is specified when the instrument is ordered, a

conversion factor based on the specific heat of the process gas is used to

determine a new full scale flow. This process gas and new full scale flow

will also be indicated on the label. If using a process gas other than that

specified at the time of order placement, a new full scale flow can be

determined as detailed in Section 3-4.

Table 3-1 Output vs. Flow Rate

Output Signal Flow Rate

(Vdc) (% Full Scale)

5.0 100

3.75 75

2.5 50

1.25 25

0.5 10

3-2

Installation and Operation Manual

X-TMF-5700-MFM-eng

Part Number: 541B064AAG

July, 2017

Brooks

®

5700 Electronic Flowmeter

Section 3 Operation

3-4 Use of Conversion Factors

A list of sensor conversion factors is given in Table 3-2. To change to a new

gas, multiply the meter output by the sensor factor for the new gas.

Output

full Signal Appropriate

Actual gas = scale x (Vdc) x sensor conversion

flow rate N

2

factor of the new gas

Flow 5.000

Example:

The flowmeter is calibrated for 10 slpm Nitrogen.

The process gas is carbon dioxide.

The flowmeter output is 3.750 volts (75%).

What is the actual carbon dioxide flow?

Actual CO

2

= 10 x 3.75 Vdc x .773

flow rate slpm 5.0 Vdc

= 7.5 slpm x .773 = 5.798 slpm

In order to calculate the conversion factor for a gas mixture the following

formula should be used:

Sensor 100

Conversion = P1 P2 Pn

sensor + sensor + sensor

conversion conversion conversion

factor 1 factor 2 factor n

Where, P1 = percentage (%) of gas 1 (by volume)

P2 = percentage (%) of gas 2 (by volume)

Pn = percentage (%) of gas n (by volume)

Example:

The gas is 20% Helium (He) and 80% Chlorine (CI) by volume.

Sensor conversion factor for the mixture is:

100

Mixture = = .946

Factor 20 + 80

1.386 .876

It is generally accepted that the flow rate derived from this equation is only

accurate to ±5%. The sensor conversion factors given in Table 3-2 are

calculated based on a gas temperature of 21°C and a pressure of one

atmosphere. Gas conditions that vary widely from these reference

conditions may cause an additional error due to the change in specific

heat.

3-3

Installation and Operation Manual

X-TMF-5700-MFM-eng

Part Number: 541B064AAG

July, 2017

Brooks

®

5700 Electronic Flowmeter

Section 3 Operation

GAS NAME FORMULA SENSOR

FACTOR

Hexafuoropropylene (HFP) C

3

F

6

0.249

Hexamethyldisilazane (HMDS) C

6

H

19

NSi

2

0.139

Hexane C

6

H

14

0.204

Hydrogen H

2

1.008

Hydrogen Bromide HBr 0.987

Hydrogen Chloride HCL 0.983

Hydrogen Cyanide HCN 0.744

Hydrogen Fluoride HF 0.998

Hydrogen Iodide HI 0.953

Hydrogen Selenide H

2

Se 0.837

Hydrogen Sulfide H

2

S 0.850

Iodine Pentafluoride IF

5

0.283

Isobutane C

4

H

10

0.260

Isobutene C

4

H

8

0.289

Krypton Kr 1.382

Methane CH

4

0.763

Methylacetylene C

3

H

4

0.473

Methyl Bromide CH

3

Br 0.646

3-Methyl-1-butene C

5

H

10

0.252

Methyl Chloride CH

3

CL 0.687

Methyl Fluoride CH

3

F 0.761

Methyl Mercaptan CH

4

S 0.588

Methyl Vinyl Ether C

3

H

6

O 0.377

Monomethylamine CH

3

NH

2

0.565

Neon Ne 1.398

Nickel Carbonyl Ni(CO)

4

0.212

Nitric Oxide NO 0.995

Nitrogen N

2

1.000

Nitrogen Dioxide NO

2

0.758

Nitrogen Trifluoride NF

3

0.501

Nitrogen Trioxide N

2

O

3

0.443

Nitrosyl Chloride NOCL 0.644

Nitrous Oxide N

2

O 0.752

Octofluorocyclobutane C

4

F

8

0.169

Oxygen O

2

0.988

Oxygen Difluoride OF

2

0.672

Ozone O

3

0.738

Perchloryl Fluoride CLO

3

F 0.448

Perfluorobutane C

4

F

10

0.738

Perfluoromethyl-vinylether PMVE 0.296

Phosgene COCL

2

0.504

Phosphine PH

3

0.783

Phosphorous Pentafluoride PF

5

0.346

Phosphorous Trifluoride PF

3

0.495

Propane (same as CH

3

CH

2

CH

3

)C

3

H

8

0.343

Propylene (Propene) C

3

H

6

0.401

Rhenium Hexafluoride ReF

6

0.230

Silane SiH

4

0.625

Silicon Tetrachloride SiCL

4

0.310

Silicon Tetrafluoride SiF

4

0.395

Sulfur Dioxide SO

2

0.728

Sulfur Hexafluoride SF

6

0.270

Sulfuryl Fluoride SO

2

F

2

0.423

Tetrachloromethane CCL

4

0.344

Tetrafluoroethylene (TFE) C

2

F

4

0.361

Tetrafluorohydrazine N

2

F

4

0.367

Trichlorofluoromethane f-11 CCL

3

F 0.374

Trichlorosilane SiHCL

3

0.329

Trimethyborate (TMB) B(OCH

3

)

3

0.300

1,1,2-Trichloro-1,1,2-Triflouroet f-113 C

2

CL

3

F

3

0.231

Trimethylamine (CH

3

)

3

N 0.316

Tungsten Hexafluoride WF

6

0.227

Uranimum Hexafluoride UF

6

0.220

Vinyl Bromide C

2

H

3

Br 0.524

Vinyl Chloride C

2

H

3

CL 0.542

Vinyl Fluoride C

2

H

3

F 0.576

Xenon Xe 1.383

Table 3-2 Nitrogen Based Conversion Factors

GAS NAME FORMULA SENSOR

FACTOR

Acetylene C

2

H

2

0.615

Air Mixture 0.998

Allene C

3

H

4

0.478

Ammonia NH

3

0.786

Argon Ar 1.395

Arsine AsH

3

0.754

Boron Trichloride BCL

3

0.443

Boron Trifluoride BF

3

0.579

Bromine Pentafluoride BrF

5

0.287

Bromine Trifluoride BrF

3

0.439

Bromotrifluoroethylene C

2

BrF

3

0.326

Bromotrifluoromethane f-13B1 CBrF

3

0.412

1,3-Butadiene C

4

H

6

0.354

Butane C

4

H

10

0.257

1-Butene C

4

H

8

0.294

CIS-2-Butene C

4

H

8

0.320

Trans-2-Butene C

4

H

8

0.291

Carbon Dioxide CO

2

0.740

Carbon Disulfide CS

2

0.638

Carbon Monoxide CO 0.995

Carbon Tetrachloride CCL

4

0.344

Carbon Tetrafluoride f-14 CF

4

0.440

Carbonyl Fluoride COF

2

0.567

Carbonyl Sulfide COS 0.680

Chlorine CL

2

0.876

Chlorine Dioxide CLO

2

0.693

Chlorine Trifluoride CLF

3

0.433

Chlorodifluoromethane f-22 CHCLF

2

0.505

Chloroform (Trichloromethane) CHCL

3

0.442

Chloropentafluoroethane f-115 C

2

CLF

5

0.243

Chlorotrifluoroethylene C

2

CLF

3

0.337

Chlorotrifluoromethane f-13 CCLF

3

0.430

Cyanogen (CN)

2

0.498

Cyanogen Chloride CLCN 0.618

Cyclobutane C

4

H

8

0.387

Cyclopropane C

3

H

6

0.505

Deuterium D

2

0.995

Diborane B

2

H

6

0.448

Dibromodifluoromethane f-12B2 CBr

2

F

2

0.363

1,2-Dibromotetrafluoroethane f-114B2 C

2

Br

2

F

4

0.215

Dichlorodifluoromethane f-12 CCL

2

F

2

0.390

Dichlorofluoromethane f-21 CHCL

2

F 0.456

Dichlorosilane SiH

2

CL

2

0.442

1,2-Dichloroethane C

2

H

4

Cl

2

0.382

1,2-Dichlorotetrafluoroethane f-114 C

2

CL

2

F

4

0.231

1,1-Difluoro-1-Chloroethane C

2

H

3

CLF

2

0.341

1,1-Difluoroethane CH

3

CHF

2

0.415

1,1-Difluoroethylene CH

2

:CF

2

0.458

Difluoromethane f-32 CF

2

H

2

0.627

Dimethylamine (CH

3

)

2

NH 0.370

Dimethylether (CH

3

)

2

O 0.392

2,2-Dimethylpropane C(CH

3

)

4

0.247

Disilane Si

2

H

6

0.332

Ethane C

2

H

6

0.490

Eyhyne C

2

H

2

0.656

Ethylacetylene C

4

H

6

0.365

Ethyl Chloride C

2

H

5

CL 0.408

Ethylene C

2

H

4

0.619

Ethylene Dichloride C

2

H

4

CL

2

0.382

Ethylene Oxide C

2

H

4

O 0.589

Fluorine F

2

0.924

Fluoroform f-23 CHF

3

0.529

Germane GeH

4

0.649

Helium He 1.386

Hexafluoroethane f-116 C

2

F

6

0.255

3-4

Installation and Operation Manual

X-TMF-5700-MFM-eng

Part Number: 541B064AAG

July, 2017

Brooks

®

5700 Electronic Flowmeter

Section 3 Operation

THIS PAGE WAS

INTENTIONALLY

LEFT BLANK

4-1

Installation and Operation Manual

X-TMF-5700-MFM-eng

Part Number: 541B064AAG

July, 2017

Brooks

®

5700 Electronic Flowmeter

Section 4 Maintenance &

Troubleshooting

4-1 General

No routine maintenance is required on the MassRate 5700. If an in-line

filter is used, it should be periodically replaced or ultrasonically cleaned.

4-2 Troubleshooting

A. System Checks

The MassRate 5700 is generally used as a component in gas handling

systems which can be quite complex. This can make the task of isolating a

malfunction in the system a difficult one. An incorrectly diagnosed

malfunction can cause many hours of unnecessary downtime. If possible,

make the following system checks before removing a suspected defective

flowmeter for bench troubleshooting or return, especially if the system is

new.

4-2

Installation and Operation Manual

X-TMF-5700-MFM-eng

Part Number: 541B064AAG

July, 2017

Brooks

®

5700 Electronic Flowmeter

Section 4 Maintenance &

Troubleshooting

B. Bench Troubleshooting

1. Properly connect the mass flowmeter to a 12 to 15 Vdc power supply.

Connect an output signal readout device, 4-1/2 digit voltmeter is

recommended to pins 2 and 4 of connector (refer to Figure 2-1). Apply

power, and allow the flowmeter to warm up for 20 minutes. Do not

connect to a gas source at this time. Observe the output signal and, if

necessary perform the zero adjustment procedure (Section 2-8). If the

output signal will not zero properly, refer to the Sensor

Troubleshooting, Section 4-2c. If the sensor is electrically functional,

the printed circuit board may be defective and will require

replacement. If the instrument requires service, contact the Brooks

Product Service Group for a R.M.A. number.

2. Connect the flowmeter to a gas source. Nitrogen or air should be used

for this bench test. Increase the flow until 100% indication (5.00 Vdc)

is achieved. Vary the flow rate over the 5 to 100% range and verify that

the output signal follows the flow rate. If possible, connect a flow

measurement device in series with the flowmeter to observe the actual

flow behavior and verify the accuracy of the flowmeter. If the flowmeter

functions as described above, it is functioning properly, and the

problem may lie elsewhere. Refer to Table 4-1 for additional troubleshooting.

C. Sensor Troubleshooting

If it is believed the sensor coils are either open or shorted. Remove the

cover can. Remove the PCB.

Unplug sensor flex cable from the PCB. Troubleshoot using Table 4-2. If

any of the steps do not produce the expected results the sensor assembly

is defective and the flowmeter should be returned to the factory.

1. Verify a low resistance common connection and that the correct

power supply voltage and signals are reaching and leaving the meter.

Refer to Section 2-7.

2. Verify that the process gas connections have been correctly

terminated and leak checked, and gas supply is on. Refer to Section 2-6.

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Brooks 5700 Istruzioni per l'uso

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