Brooks VDM300 Istruzioni per l'uso

Tipo
Istruzioni per l'uso
Installation and Operation Manual
X-VAP-VDM300-eng
Part Number: 541B210AAG
October , 2018
Brooks
®
VDM300 Vapor Delivery Module
Brooks
®
VDM300
DI Water Vapor Delivery Module
VDM300
Vapor Delivery Module
Installation and Operation Manual
X-VAP-VDM300-eng
Part Number: 541B210AAG
October, 2018
Brooks
®
VDM300 Vapor Delivery Module
ESD (Electrostatic Discharge)
CAUTION: This instrument contains electronic components that are susceptible to damage by static electricity. Proper handling procedures must be observed
during the removal, installation or other handling of internal circuit boards or devices.
Handling Procedure:
1. Power to unit must be removed.
2. Personnel must be grounded, via a wrist strap or other safe, suitable means before any printed circuit card or other internal device is installed,
removed or adjusted.
3. Printed circuit cards must be transported in a conductive container. Boards must not be removed from protective enclosure until immediately before
installation. Removed boards must immediately be placed in protective container for transport, storage or return to factory.
Comments
This instrument is not unique in its content of ESD (electrostatic discharge) sensitive components. Most modern electronic designs contain components
that utilize metal oxide technology (NMOS, SMOS, etc.). Experience has proven that even small amounts of static electricity can damage or destroy these
devices. Damaged components, even though they appear to function properly, exhibit early failure.
Brooks Instrument designs, manufactures and tests its products to meet many national and international standards. These products must be properly
installed, operated and maintained to ensure they continue to operate within their normal specifications. The following instructions must be adhered to
and integrated into your safety program when installing, operating and maintaining Brooks Instrument products.
•To ensure proper performance, use qualified personnel to install, operate, update, program and maintain the product.
•Read all instructions prior to installing, operating and servicing the product. If this instruction manual is not the correct manual, please see back cover
for local sales office contact information. Save this instruction manual for future reference.
WARNING: Do not operate this instrument in excess of the specifications listed in the Instruction and Operation Manual. Failure to heed
this warning can result in serious personal injury and / or damage to the equipment.
If you do not understand any of the instructions, contact your Brooks Instrument representative for clarification.
Follow all warnings, cautions and instructions marked on and supplied with the product.
WARNING: Prior to installation ensure this instrument has the required approval ratings to meet local and national codes. Failure to heed this warning can
result in serious personal injury and / or damage to the equipment.
Install your equipment as specified in the installation instructions of the appropriate instruction manual and per applicable local and national codes.
Connect all products to the proper electrical and pressure sources.
Operation: (1) Slowly initiate flow into the system. Open process valves slowly to avoid flow surges. (2) Check for leaks around the flow meter inlet
and outlet connections. If no leaks are present, bring the system up to the operating pressure.
Please make sure that the process line pressure is removed prior to service. When replacement parts are required, ensure that qualified people use
replacement parts specified by Brooks Instrument. Unauthorized parts and procedures can affect the product's performance and place the safe
operation of your process at risk. Look-alike substitutions may result in fire, electrical hazards or improper operation.
Ensure that all equipment doors are closed and protective covers are in place to prevent electrical shock and personal injury, except when
maintenance is being performed by qualified persons.
WARNING: For liquid flow devices, if the inlet and outlet valves adjacent to the devices are to be closed for any reason, the devices must be completely
drained. Failure to do so may result in thermal expansion of the liquid that can rupture the device and may cause personal injury.
All pressure equipment with an internal pressure greater than 0.5 bar (g) and a size larger than 25mm or 1" (inch) falls under the Pressure Equipment Directive (PED).
The Specifications Section of this manual contains instructions related to the PED directive.
Products described in this manual are in compliance with EN directive 2014/34/EU.
All Brooks Instrument Flowmeters fall under fluid group 1.
Products larger than 25mm or 1" (inch) are in compliance with PED category I, II or III.
Products of 25mm or 1" (inch) or smaller are Sound Engineering Practice (SEP).
The Brooks Instrument (electric/electronic) equipment bearing the CE mark has been successfully tested to the regulations of the Electro Magnetic
Compatibility (EMC directive 2014/30/EU).
Special attention however is required when selecting the signal cable to be used with CE marked equipment.
Quality of the signal cable, cable glands and connectors:
Brooks Instrument supplies high quality cable(s) which meets the specifications for CE certification.
If you provide your own signal cable you should use a cable which is overall completely screened with a 100% shield.
“D” or “Circular” type connectors used should be shielded with a metal shield. If applicable, metal cable glands must be used providing cable screen clamping.
The cable screen should be connected to the metal shell or gland and shielded at both ends over 360 Degrees.
The shield should be terminated to an earth ground.
Card Edge Connectors are standard non-metallic. The cables used must be screened with 100% shield to comply with CE certification.
The shield should be terminated to an earth ground.
For pin configuration : Please refer to the enclosed Instruction Manual.
European Pressure Equipment Directive (PED)
European Electromagnetic Compatibility (EMC)
Essential Instructions
Read before proceeding!
Installation and Operation Manual
X-VAP-VDM300-eng
Part Number: 541B210AAG
October, 2018
Brooks
®
VDM300 Vapor Delivery Module
Dear Customer,
We appreciate this opportunity to service your vaporizer and ow control requirements with a Brooks Instrument
device. Every day, ow customers all over the world turn to Brooks Instrument for solutions to their gas and
liquid low-ow applications. Brooks provides an array of vaporizer, ow and pressure measurement and control
products for various industries from biopharmaceuticals, oil and gas, fuel cell research and chemicals, to
medical devices, analytical instrumentation, semiconductor manufacturing, and more.
The Brooks product you have just received is of the highest quality available, offering superior performance,
reliability and value to the user. It is designed with the ever changing process conditions, accuracy requirements
and hostile process environments in mind to provide you with a lifetime of dependable service.
We recommend that you read this manual in its entirety. Should you require any additional information concerning
Brooks products and services, please contact your local Brooks Sales and Service Ofce listed on the back cover
of this manual or visit www.BrooksInstrument.com
Yours sincerely,
Brooks Instrument
Installation and Operation Manual
X-VAP-VDM300-eng
Part Number: 541B210AAG
October, 2018
Brooks
®
VDM300 Vapor Delivery Module
ESD (Electrostatic Discharge)
CAUTION: This instrument contains electronic components that are susceptible to damage by static electricity. Proper handling procedures
must be observed during the removal, installation or other handling of internal circuit boards or devices.
Handling Procedure:
1. Power to unit must be removed.
2. Personnel must be grounded, via a wrist strap or other safe, suitable means before any printed circuit card or other internal device is installed,
removed or adjusted.
3. Printed circuit cards must be transported in a conductive container. Boards must not be removed from protective enclosure until immediately before
installation. Removed boards must immediately be placed in protective container for transport, storage or return to factory.
Comments
This instrument is not unique in its content of ESD (electrostatic discharge) sensitive components. Most modern electronic designs contain components
that utilize metal oxide technology (NMOS, SMOS, etc.). Experience has proven that even small amounts of static electricity can damage or destroy these
devices. Damaged components, even though they appear to function properly, exhibit early failure.
Brooks Instrument designs, manufactures and tests its products to meet many national and international standards. These products must be properly
installed, operated and maintained to ensure they continue to operate within their normal specications. The following instructions must be adhered to
and integrated into your safety program when installing, operating and maintaining Brooks Instrument products.
To ensure proper performance, use qualied personnel to install, operate, update, program and maintain the product.
Read all instructions prior to installing, operating and servicing the product. If this instruction manual is not the correct manual, please see back
cover for local sales ofce contact information. Save this instruction manual for future reference.
WARNING: Do not operate this instrument in excess of the specications listed in the Instruction and Operation Manual. Failure to heed
this warning can result in serious personal injury and / or damage to the equipment.
If you do not understand any of the instructions, contact your Brooks Instrument representative for clarication.
Follow all warnings, cautions and instructions marked on and supplied with the product.
WARNING: Prior to installation ensure this instrument has the required approval ratings to meet local and national codes. Failure to heed
this warning can result in serious personal injury and / or damage to the equipment.
Install your equipment as specied in the installation instructions of the appropriate instruction manual and per applicable local and national codes.
Connect all products to the proper electrical and pressure sources.
Operation: (1) Slowly initiate ow into the system. Open process valves slowly to avoid ow surges. (2) Check for leaks around the ow meter inlet
and outlet connections. If no leaks are present, bring the system up to the operating pressure.
Please make sure that the process line pressure is removed prior to service. When replacement parts are required, ensure that qualied people
use replacement parts specied by Brooks Instrument. Unauthorized parts and procedures can affect the product's performance and place the safe
operation of your process at risk. Look-alike substitutions may result in re, electrical hazards or improper operation.
Ensure that all equipment doors are closed and protective covers are in place to prevent electrical shock and personal injury, except when
maintenance is being performed by qualied persons.
WARNING: For liquid ow devices, if the inlet and outlet valves adjacent to the devices are to be closed for any reason, the devices must
be completely drained. Failure to do so may result in thermal expansion of the liquid that can rupture the device and may cause personal
All pressure equipment with an internal pressure greater than 0.5 bar (g) and a size larger than 25mm or 1" (inch) falls under the Pressure Equipment
Directive (PED).
The Specications Section of this manual contains instructions related to the PED directive.
Products described in this manual are in compliance with EN directive 2014/34/EU.
All Brooks Instrument Flowmeters fall under uid group 1.
Products larger than 25mm or 1" (inch) are in compliance with PED category I, II or III.
The Brooks Instrument (electric/electronic) equipment bearing the CE mark has been successfully tested to the regulations of the Electro Magnetic Compatibility (EMC
directive 2014/30/EU).
Special attention however is required when selecting the signal cable to be used with CE marked equipment.
Quality of the signal cable, cable glands and connectors:
Brooks Instrument supplies high quality cable(s) which meets the specications for CE certication.
If you provide your own signal cable you should use a cable which is overall completely screened with a 100% shield.
“D” or “Circular” type connectors used should be shielded with a metal shield. If applicable, metal cable glands must be used providing cable screen clamping.
European Pressure Equipment Directive (PED)
European Electromagnetic Compatibility (EMC)
Essential Instructions
Read before proceeding!
Installation and Operation Manual
X-VAP-VDM300-eng
Part Number: 541B210AAG
October, 2018
Brooks
®
VDM300 Vapor Delivery Module
Paragraph Page
Number Number
Section 1 Introduction
1-1 Introduction.................................................................................................................................. 1-1
1-2 How To Use This Manual ............................................................................................................ 1-1
1-3 Product Support References ....................................................................................................... 1-2
1-4 Warning, Caution and Notice Statements ................................................................................... 1-2
1-5 Product Warranty ........................................................................................................................ 1-2
1-6 Glossary of Terms and Acronyms ................................................................................................ 1-2
1-7 Description .................................................................................................................................. 1-3
1-8 Specications for VDM300 Devices ............................................................................................ 1-4
1-9 Overview of VDM300 Device Enclosure ..................................................................................... 1-5
1-10 Internal Layout of VDM300 and Basic Function .......................................................................... 1-9
1-11 Dimensions of VDM300 Device Enclosure................................................................................. 1-10
Section 2 Installation
2-1 General........................................................................................................................................ 2-1
2-2 Receipt of Equipment .................................................................................................................. 2-1
2-3 Recommended Storage Practice ................................................................................................ 2-2
2-4 VDM300 Mounting and Orientation ............................................................................................. 2-2
2-5 Mechanical Connections ............................................................................................................. 2-2
2-5-1 Inlet Connections......................................................................................................................... 2-3
2-5-2 Outlet Connections ...................................................................................................................... 2-4
2-6 Electrical Connections ................................................................................................................. 2-4
2-7 Diagnostic Port Connection ......................................................................................................... 2-8
2-8 Return Shipment ......................................................................................................................... 2-8
2-9 Transit Precautions ..................................................................................................................... 2-8
2-10 Removal From Storage ............................................................................................................... 2-8
2-11 Product Safety Information .......................................................................................................... 2-9
Section 3 Startup
3 Operation..................................................................................................................................... 3-1
3-1 Idle Mode..................................................................................................................................... 3-1
3-2 Normal Mode ............................................................................................................................... 3-1
3-2-1 Start-up (Normal Mode) ............................................................................................................... 3-2
3-2-2 Ready-to-Use (Normal Mode) ..................................................................................................... 3-3
3-2-3 Zeroing the VDM300 ................................................................................................................... 3-3
3-2-3-1Procedure for Manually Zeroing the VDM300 ............................................................................. 3-4
3-3 Drain Mode .................................................................................................................................. 3-4
3-4 Operation of BEST for VDM300 .................................................................................................. 3-5
Section 4 Maintenance and Troubleshooting
4 Maintenance and Troubleshooting .............................................................................................. 4-1
4-1 Introduction.................................................................................................................................. 4-1
4-2 Routine Maintenance .................................................................................................................. 4-1
4-3 Troubleshooting the VDM ............................................................................................................ 4-2
4-4 General Troubleshooting Guide .................................................................................................. 4-3
4-5 Using BEST as a Diagnostic Tool ................................................................................................ 4-4
4-6 VDM300 Removal ....................................................................................................................... 4-9
4-7 VDM300 Packaging..................................................................................................................... 4-9
4-8 VDM300 Shipping ....................................................................................................................... 4-9
i ii
Installation and Operation Manual
X-VAP-VDM300-eng
Part Number: 541B210AAG
October, 2018
Brooks
®
VDM300 Vapor Delivery Module
Paragraph Page
Number Number
Section 5 Product Description Code
5 VDM300 Product Description Code ............................................................................................ 5-1
Section A Essential Instructions .............................................................................................................. A-1
Warranty, Local Sales/Service Contact Information ........................................................................Back Cover
Figures
Figure Page
Number Number
1-1 VDM Vapor Delivery Module ...................................................................................................... 1-1
1-2 Front View of the VDM300 ......................................................................................................... 1-5
1-3 Front View Details of the VDM300 LED Indicators ..................................................................... 1-6
1-4 Bottom View of the VDM ............................................................................................................. 1-7
1-5 VDM300 Block Diagram ............................................................................................................. 1-9
2-1 VDM300 Installation Orientation.................................................................................................. 2-3
2-2 Diagram of Electrical Connections to the VDM300 .................................................................... 2-5
Tables
Table Page
Number Number
1-1 Terms and Acronyms ................................................................................................................... 1-2
1-2 Specications for Standard VDM300 .......................................................................................... 1-4
2-1 VDM300 Analog Connector Pin-Out............................................................................................ 2-6
3-1 Signals Required for Switching Modes on the VDM300.............................................................. 3-1
4-1 General Troubleshooting Information and Courses of Action ...................................................... 4-3
4-2 List of Possible Alarm Codes Detected by the VDM300 ............................................................. 4-4
5-1 VDM Product Description Code .................................................................................................. 5-1
i ii
Installation and Operation Manual
X-VAP-VDM300-eng
Part Number: 541B210AAG
October, 2018
Brooks
®
VDM300 Vapor Delivery Module
1-1 Introduction
The VDM300 is a self-contained, ultra-high purity vapor delivery module
providing precise, low ow deionized (DI) water vapor for high purity applica-
tions such as microelectronics manufacturing. Utilizing a heated, all-welded
titanium vapor tank with automated level-sensing and lling, the VDM300
produces vapor ow in a non-superheated vapor stage to reduce the ag-
gressive effects of DI water. Vapor ow is controlled by an integrated Brooks
Instrument high temperature thermal mass ow controller. The thermal mass
ow controller is a high stability ow sensor compatible with the elevated
internal temperatures found in the VDM300.
1-2 How To Use This Manual
This manual is intended to provide the user with all the information necessary
to install, operate, troubleshoot and maintain this vaporizer. The manual is
organized in the following sections:
Section 1 Introduction
Section 2 Installation
Section 3 Operation
Section 4 Maintenance and Troubleshooting
Section 5 Product Description Code
Appendix A Essential Instructions
Warranty, Local Sales/Service Contact Information
It is recommended that this manual be read in its entirety before attempting
to operate or repair these devices.
Figure 1-1 VDM Vapor Delivery Module
1-1 1-2
Installation and Operation Manual
X-VAP-VDM300-eng
Part Number: 541B210AAG
October, 2018
Brooks
®
VDM300 Vapor Delivery Module
1-3 Product Support References
Refer to www.BrooksInstrument.com for Brooks sales and service locations
and to obtain other documents that support the VDM300 Series.
Those documents include:
• Brooks VDM300 data sheet (DS-VAP-VDM300-eng)
• Supplemental Manual for Brooks
®
Instrument EtherCAT for VDM300
Series (X-DPT-EtherCAT-VDM300-eng; part number: 541B217AAG)
• Supplemental Manual for Brooks Instrument Expert Support Tool
(X-SW-BEST-eng; part number 541B197AAG)
1-4 Warning, Caution and Notice Statements
Warning, caution and notice statements are located throughout this manual
in ANSI format.
A WARNING statement indicates a potentially hazardous situation which, if
not avoided, COULD result in death or serious injury.
A CAUTION statement indicates a potentially hazardous situation which, if
not avoided, MAY result in minor or moderate injury. It may also be used to
alert against unsafe practices.
A NOTICE statement describes specic information that requires special at-
tention.
1-5 Product Warranty
Product warranty information can be found on the back cover of this
manual and on the Brooks website at www.BrooksInstrument.com. This
information provides general warranty information, limitations, disclaimers,
and applicable warranty periods according to product group.
1-6 Glossary of Terms and Acronyms (Refer to Table 1-1)
Table 1-1 Terms and Acronyms
Term/ Acronym Definition
BEST Brooks Expert Support Tool (GUI)
COO Cost of Ownership
DIW Deionized Water
DSP Digital Signal Processor
EtherCAT Ethernet for Control Automation Technology is an open high
performance Ethernet-based fieldbus system
F.S. Full scale
GUI Graphical user interface (refer to BEST)
IEC International Electrotechnical Commission
LA Link Active
LED Light-emitting diode
MFC Mass flow controller
PID Proportional Integral Derivative
PDC Product description code
PSID Pounds per square inch differential
PSIG Pounds per square inch gauge
RH Relative humidity
RJ-45 Standard type of connector for network cables featuring eight
pins to which the wire strands of a cable interface electrically
SDS Safety data sheet
S.P. Setpoint
1-1 1-2
Installation and Operation Manual
X-VAP-VDM300-eng
Part Number: 541B210AAG
October, 2018
Brooks
®
VDM300 Vapor Delivery Module
1-7 Description
The VDM300 is a self-contained, ultra-high purity vapor delivery module
providing precise, low ow deionized (DI) water vapor for high purity applica-
tions such as microelectronics manufacturing. Utilizing a heated, all-welded
titanium vapor tank with automated level-sensing and lling, the VDM300
produces vapor ow in a non-superheated vapor stage to reduce the ag-
gressive effects of DI water. Vapor ow is controlled by an integrated Brooks
Instrument high temperature thermal mass ow controller. The mass ow
sensor is a high stability ow sensor compatible with the elevated internal
temperatures found in the VDM300.
The result is a highly accurate, robust and responsive vapor delivery module
for challenging conditions.
• High temperature capability ensures reliable delivery of condensable gases
and precursors
• Digital measurement and control enhances accuracy (±1% of setpoint
>10% FS) and repeatability (±0.2% F.S.)
• Ultra-high purity vapor ow path ensures integrity and purity of the gas/va-
por
• Ultra-stable ow sensor reduces maintenance resulting in superior uptime
and lower cost of ownership (COO)
All metal diaphragm-free control valve design optimizes reliability
Ultra High Purity Flow Path
• The mass ow controllers are constructed with a 10µ in Ra max surface
nish.
• Overall reduced surface area and un-swept volumes for faster dry-down
during purge steps
• Long-term sensor and device stability for maximum yield and throughput
Ultra High Purity Process Connections
VDM300 supports all metal seal/UHP industry gas connection interface stan-
dards for full OEM and process coverage.
• DI Water Inlet: ¼” VCR Male or ¼” tube compression tting
• DI Water Vapor Outlet: 3/8-½” VCR Male tting
• Tank Drain: 1/8" Instant Tube tting
Analog & Digital Interfaces
The VDM300 supports analog input/output of 0-5 volt dc, TTL (0-5 Vdc)
digital controls and alarms or optionally up to 24 Vdc when using an external
power supply, a USB diagnostic port, and EtherCAT communications. Analog
and digital controls are transmitted via the 15-pin D-subminiature connec-
tor. Reference Table 2-1 for pin assignments. USB digital communication is
transmitted via the micro-USB diagnostics port. Optional EtherCAT digital
communication is transmitted via the dual RJ-45 connectors. Reference
Supplemental Manual for Brooks Instrument EtherCAT for VDM300 Series
(X-DPT-VDM300-EtherCAT) for EtherCAT assignments and Supplemental
Manual for Brooks Instrument Brooks Expert Support Tool (X-SW-BEST-eng)
for diagnostic port communication.
1-3 1-4
Installation and Operation Manual
X-VAP-VDM300-eng
Part Number: 541B210AAG
October, 2018
Brooks
®
VDM300 Vapor Delivery Module
Table 1-2 Specications for Standard VDM300
1-8 Specications for VDM300 Devices (See Table 1-2)
Description
Performance
Specications
1
Full Scale Ranges (H
2
O)
3000 sccm
Turndown Ratio
20:1
Step Response
Time
2 seconds (±2% of setpoint)
Accuracy
±1.0% of setpoint (> 10% full scale); ±0.2% of full scale (5-10% full scale setpoint)
Linearity
±0.5% of full scale
Repeatability
±0.2% of full scale
Temperature Coecient
0.05% F.S. per °C (zero and span)
Valve Shutdown
<0.5% F.S. (water vapor)
Electrical
Communication
Analog or EtherCAT
Connections
15-pin D-Sub and dual RJ-45
Input Signals
Flow setpoint (0 to 5 Vdc)
Start up/drain
Output Signals
Flow output (0 to 5 Vdc)
Ready to use
Power
DC: ±15 Vdc ±5% @ 1.2 amp
AC: 208-230 Vac, 50/60 Hz, 290 watts nominal
Diagnostic Port
Micro USB
Mechanical
Fittings
See Model Code for list
Weight
Dry: 15lbs Wet: 16lbs
Mounting Orientation
Vertical (inlet down)
Environmental
Maximum Outlet Pressure
≤200 Torr
DI Water Supply Pressure
10 to 40 psig (20 psig recommended)
DI Water Quality
UHP: 18 mega ohm-cm
N
22
22
2
Purge Pressure
10 to 40 psig (20 psig recommended)
Ambient
Temperature Range
15°C to 45°C
Humidity
0 to 95% RH, non-condensing
Certications
Electromagnetic Compatibility
Fully compliant to Directive 2014/30/EU (EN: 61326-1:2013)
Low Voltage
L Fully compliant to Directive 2014/35/EC (EN: 61010-1:2010)
RoHS
Fully compliant to Directive 2011/65/EU
REACH
Fully compliant to Directive EC 1907/2006
SEMI E54.20-1108
Standard for Sensor/Actuator Network Communication for EtherCAT
1. All performance specications apply only in the ready state, ready light on.
Special conditions safe use:
for
A. To ensure full EMC protection
the
ferrite core included with the device (Wurth Electronics Inc Part Number 74271131 ) must be installed to the control cable.
B. To ensure full EMC protection a shielded AC power cable and a shielded control cable (<30 m. length) must be supplied by the user.
1-3 1-4
Installation and Operation Manual
X-VAP-VDM300-eng
Part Number: 541B210AAG
October, 2018
Brooks
®
VDM300 Vapor Delivery Module
Figure 1-2 Front View of the VDM300
1-9 Overview of VDM300 Device Enclosure
1-5 1-6
Installation and Operation Manual
X-VAP-VDM300-eng
Part Number: 541B210AAG
October, 2018
Brooks
®
VDM300 Vapor Delivery Module
Figure 1-3 Front View Details of the VDM300 LED Indicators
Figure 1-3 (above) shows a detailed view of the switches and indicators
located on the front of the VDM300. The following is a description of each
switch and indicator.
ZERO: This is a momentary detent switch that activates a zeroing function to
remove any zero offset that may have accumulated over time during normal
VDM300 operation. Refer to the section called VDM300 Zeroing later in this
manual for information on when and how to use this function properly.
DEVICE READY: (Green LED)This indicates when the VDM300 is Ready-
to-Use (RTU). lt also serves as an indicator when a drain cycle is complete
(blinkíng).
WARM UP: (Amber LED)This indicates when the VDM300 is warming up
(solid) or at the desired temperature (blinking).
DEVICE FAULT: (Red LED) This indicates an alarm/fault condition.
ECAT ERR: (Red LED) Indicates EtherCAT error status. See the Supple-
mental Manual for Brooks Instrument EtherCAT for VDM300 Series ( X-DPT-
VDM300-EtherCAT) for details on the various states.
ECAT ID: These three 16-position rotary switches (X100, X10 and X1) are
used to set the serial address for the VDM300 device in EtherCAT communi-
cation networks. The three switches create a 3-digit address as in the follow-
ing example: if the X100 switch is set to “A”, the X10 switch to “5” and the X1
to “B”, the serial address would be “A5B”.
1-5 1-6
Installation and Operation Manual
X-VAP-VDM300-eng
Part Number: 541B210AAG
October, 2018
Brooks
®
VDM300 Vapor Delivery Module
Figure 1-4 Bottom View of the VDM
Figure 1-4 is a diagram of the bottom view of the VDM300. The following is a
description of the various connections and features:
A. lnput/Output: This connection is a 15-Pin D-subminiature (DB-15) plug
(male). DC power and operational signals are routed through this connector.
Reference Table 2-1 for details.
B. DIAG: This connection is a micro USB port. This provides communication
access to the VDM300 for use by the Brooks Expert Support Tool (BEST).
See Section 3-4 Operation of the GUI for VDM300 and the Brooks GUl
manual for information on how to properly connect to and utilize this port.
C. EtherCAT: This connection is a dual RJ-45 connection. This connection
1-7 1-8
Installation and Operation Manual
X-VAP-VDM300-eng
Part Number: 541B210AAG
October, 2018
Brooks
®
VDM300 Vapor Delivery Module
allows the user to send commands and set points and receive ow and alarm
signals from the VDM300 utilizing an EtherCAT network. See Figure 1-4.
D. Power Entry Module: The power entry module is used to connect AC
power to the VDM300 tank heaters. See Section 1-13 VDM300 lnternal Lay-
out and Basic Function for more details about the tank heaters. The VDM300
is congured to accept 208-230 VAC power, provided by the end user, via a
shielded AC power cord with an IEC C-13 connector.
The power entry module consists of 3 main features as follows:
a. The AC input plug is a standard IEC C-14 connector where AC power can
be connected to the VDM300.
b. The ON/OFF switch for switching AC power to the VDM300 tank
heaters on or off. Please note that you cannot "power cycle" the device from
this switch; only the tank heaters.
c. The fuse drawer holds two 250V 3A fuses to protect the AC tank heaters.
E. Dl Water lnlet: This is where the Dl water supply is to be connected by
the end user. The tting is either a 1/4" VCR Male tting or a 1/4"
compression tube tting depending on the conguration ordered. Ensure the
DI water source is equal to or better than UHP ( 18 mega ohm-cm). This is
also where a nitrogen gas supply is to be connected for the purpose of
draining the VDM300. Ensure that either uid is pressurized to 10 - 40 psig.
See Section 2-5-1 Inlet Connections for more details and instructions on how
to connect Dl water and/or N2 to the inlet.
F. Tank Drain: This is a 1/8" lnstant Tube Fitting. This is the outlet through
which the Dl water is drained from the tank. See Section 1-10 VDM300 lnter-
nal Layout and Basic Function for more details about the tank.
1-7 1-8
Installation and Operation Manual
X-VAP-VDM300-eng
Part Number: 541B210AAG
October, 2018
Brooks
®
VDM300 Vapor Delivery Module
1-10 Internal Layout of VDM300 and Basic Function
Figure 1-5 below illustrates the internal layout of the VDM300 system. The
VDM300 has a titanium tank inside that serves as a reservoir for Dl water
and a Mass Flow Controller (MFC).The Dl water is heated to the vapor state
in the tank through the use of heaters attached to the tank and a heater
control system along with the vacuum outlet pressure. The liquid water level
is monitored by a level detection system (not shown in diagram) in the tank.
The MFC delivers the appropriate amount of Dl water vapor on demand
through the Dl water vapor outlet. The ll valve controls the ow of Dl water
into the tank which works in tandem with the level detection system to main-
tain the optimal amount of liquid Dl water in the tank for vaporization during
operation. The tank drain controlled by the drain valve allows the tank to be
emptied for maintenance and extended periods of downtime.
Figure 1-5 VDM300 Block Diagram
1-9
Installation and Operation Manual
X-VAP-VDM300-eng
Part Number: 541B210AAG
October, 2018
Brooks
®
VDM300 Vapor Delivery Module
2-1 General
This section provides installation instructions for the Brooks VDM300 Vapor
Delivery Module. The installation of the VDM300 involves mounting the de-
vice, making the required mechanical connections and making the required
electrical connections
2-2 Receipt of Equipment
When the instrument is received, the outside packing case should be
checked for damage incurred during shipment. If the packing case is dam-
aged, the local carrier should be notied at once regarding their liability. A
report should be submitted to your nearest Product Service Department.
Brooks Instrument
407 W. Vine Street
P.O. Box 903
Hateld, PA 19440 USA
Toll Free (888) 554 FLOW (3569)
Tel (215) 362 3700
Fax (215) 362 3745
www.BrooksInstrument.com
Europe Asia
Brooks Instrument GmbH Brooks Instrument Korea, Ltd.
Zur Wetterwarte 50 Haus 377/B, D-406 Bundang Techno Park 151
01109 Dresden Sungnam, Kyungki-do, 463-070
Germany Korea
Tel +49 (0) 351 215 20 442 Tel +82 31 708 2522
In case you need technical assistance:
USA 888 275 8946 Taiwan +886 3 5590 988
Europe +49 351 215 2040 China +86 21 5079 8828
Japan +81 3 5633 7100 Singapore +6297 9741
Korea +82 31 708 2521
Remove the envelope containing the packing list. Unpack and inspect
the VDM300 and additional items for any possible shipping damage. The
VDM300 is shipped with two each 312 series replacement fuses for the
power entry module, a 6’ length of 1/8" O.D. Teon tubing, a ferrite core for
the control cable, the certicate of conformance/ nal test data and the Instal-
lation & Operations Manual. The tubing can be connected to the tank drain
when draining Dl water from the tank inside the VDM300. Contact Brooks if
there are any problems or if more information is required.
The following items can be purchased separately; these items are not neces-
sary for the installation and are not used for normal operation of the VDM300
but can be utilized for troubleshooting:
The Brooks Expert Support Tool (BEST) provides diagnostic tools and an
alternate access to VDM300 functions.
NOTE: The BEST must be installed on a separate computer in order to perform any
diagnostic function. Contact Brooks for information on purchasing the software.
1-1 2-1
Installation and Operation Manual
X-VAP-VDM300-eng
Part Number: 541B210AAG
October, 2018
Brooks
®
VDM300 Vapor Delivery Module
2-3 Recommended Storage Practice
If intermediate or long-term storage of the device is required, it is recom-
mended that it be stored in accordance with the following conditions:
• Within the original shipping container.
Ambient temperature 21°C (70°F) nominal, 32°C (90°F) maximum, 7°C
(45°F) minimum.
• Relative humidity 45% nominal, 60% maximum, 25% minimum.
2-4 VDM300 Mounting and Orientation
Figure 2-1 shows the proper mounting orientation for the VDM300.The
VDM300 should be mounted using four 5/16" (7.9mm) screws tightening
them to the screw manufacturer’s recommended specications.
2-5 Mechanical Connections
Figure 1-6 shows the mechanical dimensions of the VDM300
The recommended installation procedure guidelines are as follows:
• The device should be located in a clean, dry atmosphere relatively free from
shock and vibration.
• Install the device in such a manner that permits easy purge and removal if
the device requires servicing.
Prior to installation, ensure that all piping is clean and free from obstructions.
Install piping in such a manner that permits easy access to the device if re-
moval becomes necessary.
2-2 2-3
Installation and Operation Manual
X-VAP-VDM300-eng
Part Number: 541B210AAG
October, 2018
Brooks
®
VDM300 Vapor Delivery Module
Figure 2-1 VDM300 Installation Orientation
2-2 2-3
Installation and Operation Manual
X-VAP-VDM300-eng
Part Number: 541B210AAG
October, 2018
Brooks
®
VDM300 Vapor Delivery Module
2-5-1 Inlet Connections
Dl Water & Nitrogen lnlet: The VDM300 can be ordered with a 1/4" VCR
male tting or a 1/4" tube compression tting. This inlet is where the Dl water
source is connected for normal operation, or where the nitrogen source is
connected when draining the VDM300. It is up to the user to make sure that
the proper source is available for the particular mode of operation desired.
NOTE: The inlet pressure for both uid sources must be between 10-40 psig
for proper operation.
Tank Drain: The VDM300 has a 1/8" lnstant Tube Fitting. This is the port
where the water will drain out of the tank of the VDM300.Make sure that
the 1/8" drain tube is properly connected to this port when draining the tank
The tubing should bottom out in the tting. Leave this drain line permanently
connected as repeated coupling and uncoupling can cause unnecessarily
damage the tubing.
2-5-2 Outlet Connections
Vapor Outlet: The VDM300 has a 1/2" VCR male tting for this connection.
The VDM300 is designed to deliver vapor into a vacuum so be sure that the
connection to the tool will remain at or below 200 Torr during normal
operation.
Because the internal MFC control valve is not a complete shutoff valve, it
is highly recommended that a shutoff valve be installed downstream of the
VDM300 to isolate it during device zeroing.
2-4 2-5
Installation and Operation Manual
X-VAP-VDM300-eng
Part Number: 541B210AAG
October, 2018
Brooks
®
VDM300 Vapor Delivery Module
Figure 2-2 Diagram of Electrical Connections to the VDM300
2-6 Electrical Connections
Figure 2-2 shows a diagram of the electrical connections that go to the
VDM300. Read through the following connection descriptions and make
certain that the interfacing connections from the user side meet the required
specications before any actual connections are made to the VDM300. De-
tailed instructions on how to make the electrical connections will follow.
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Brooks VDM300 Istruzioni per l'uso

Tipo
Istruzioni per l'uso